Horizontally-opposed linear motor drive installed on each axis
●2 linear motors are placed on each axis to cancel out all the magnetic forces completely,
thoroughly suppressing unbalanced loads for moving objects and guide ways
●As countermeasures for heat sources, double cooling system is used for coil interior and mounting part
●Scale feedback :
By use of the highest level resolution 0.00025μm (0.25nm) scale, stable positioning performance is promised by absolute collation of actual motion distance against motion command.
Special Ultra-Precision roller guide ways
●It implements high rigidity as well as smooth motion with non-stick slip
●Extended carriage guide length and expanded support width ensure higher straightness performance by their averaging effects
●Specially designed guidance.
Guide surface greatly enlarges contact surface. Weaving amount for both X and Y axes is greatly suppressed to 0.08~0.10μm/20mm in vertical and horizontal planes.
other futures
●Enable heavy cutting with φ16 end mill
●Surface roughness Ra 15.7nm(An average of 5 points according to Roku-Roku's condition. Measured with ZYGO NewView 7100)
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